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Model/style:
PC series
Slurry pump
|
Features / Specifications
Model/style
PC series
Type
For CMP process/slurry
Product information
This pump provides high chemical resistance, heat resistance and cleanliness, because all wetted parts are made of Fluorocarbon polymers.
The PC series has been designed to cope with CPM process and slurry-contained applications.
Main constituent
materials
Liquid contact part: PFA, PTFE
Main applications
Circulation line for chemical feed unit, cleaning systems, and CMP unit handling fluid that contains slurry
Specifications
Liquid temperature during operation: 10 to 100°C
Maximum discharge capacity: 12, 24, 48L/min
Supply air pressure: 0.2 to 0.5 MPaG
※Read the operation manual before use.
Product category
Bellows pumps
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